The Feedback Control of an Ultralow Frequency Vibration Table Based on a Fuzzy Self-Tuning PID Controller

An ultralow frequency vibration table can easily receive external interferences when it works. These interferences result to distortion of the output and reduction of calibration precision. A new method was adopted to reduce the distortion of an ultralow frequency vibration. At first, we modeled a vibration table by analyzing its structure, so that we got its transfer function. Then a fuzzy self-tuning PID controller was introduced and it was based on closed loop feedback theory. We verified the controller by MATLAB and experiments on an ultralow frequency vibration table. Simulation and experiments show that the fuzzy self-tuning controller can effectively reduce the distortion of a vibration table.