Design and Simulation of a Novel Horizontal Sensitive Inertial Micro-Switch with Low G Value

A novel horizontal sensitive inertial micro-switch with low g value was proposed and simulated in ANSYS, and was fabricated on quartz substrate based on non-silicon surface micromaching technology. Due to this special design, the micro-switch has a very good horizontal unidirectional sensitivity. Th...

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Veröffentlicht in:	Applied Mechanics and Materials 2013-07, Vol.336-338, p.281-285
Hauptverfasser:	Zhao, Xiao Lin, Wang, Yong Liang, Ding, Gui Fu, Wang, Zhao Yu, Chen, Wen Guo
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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