Effect of heat treatment on phase composition and spectral properties of heterostructures containing titanium and tungsten oxide films

The effect of heat treatment on the optical properties of heterostructures containing titanium and tungsten oxide films is studied. The films were synthesized on a quartz glass substrate in low-temperature lowpressure plasma. It is found that the heat treatment of the samples containing the tungsten oxide films in vacuum at 700°C leads to the formation of hydrogen tungsten bronze with a cubic lattice. The crystallization processes that occur in the heterostructures are affected by both the temperature of the heat treatment and the sequence of the layers on the substrate.