Intrinsically Switchable Ferroelectric Contour Mode Resonators

This paper presents the design and measurement results of intrinsically switchable interdigitated contour mode resonators based on barium titanate (BTO) thin films. The resonators have lithographically defined interdigitated electrodes that determine their resonance frequencies. The BTO thin film ex...

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Veröffentlicht in:	IEEE transactions on microwave theory and techniques 2013-08, Vol.61 (8), p.2806-2813
Hauptverfasser:	Lee, Victor, Sis, Seyit A., Phillips, Jamie D., Mortazawi, Amir
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Circuit properties Electric, optical and optoelectronic circuits Electrodes Electronics Exact sciences and technology Fabrication Ferroelectric devices Frequency measurement Instruments, apparatus, components and techniques common to several branches of physics and astronomy interdigital transducers Materials Mechanical instruments, equipment and techniques microelectromechanical systems (MEMS) Micromechanical devices and systems Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits Physics Q-factor Resonant frequency Switches
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