Intrinsically Switchable Ferroelectric Contour Mode Resonators

Intrinsically Switchable Ferroelectric Contour Mode Resonators

This paper presents the design and measurement results of intrinsically switchable interdigitated contour mode resonators based on barium titanate (BTO) thin films. The resonators have lithographically defined interdigitated electrodes that determine their resonance frequencies. The BTO thin film ex...

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Veröffentlicht in:IEEE transactions on microwave theory and techniques 2013-08, Vol.61 (8), p.2806-2813
Hauptverfasser: Lee, Victor, Sis, Seyit A., Phillips, Jamie D., Mortazawi, Amir
Format: Artikel
Sprache:eng
Schlagworte:
Applied sciences
Circuit properties
Electric, optical and optoelectronic circuits
Electrodes
Electronics
Exact sciences and technology
Fabrication
Ferroelectric devices
Frequency measurement
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
interdigital transducers
Materials
Mechanical instruments, equipment and techniques
microelectromechanical systems (MEMS)
Micromechanical devices and systems
Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits
Physics
Q-factor
Resonant frequency
Switches
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Beschreibung
Zusammenfassung:This paper presents the design and measurement results of intrinsically switchable interdigitated contour mode resonators based on barium titanate (BTO) thin films. The resonators have lithographically defined interdigitated electrodes that determine their resonance frequencies. The BTO thin film exhibits electrostriction, which allows the resonances to be switched on and off. The highest frequency device exhibits series and parallel resonance frequencies of 1.67 and 1.68 GHz and quality factors of 178 and 152, respectively, with the application of a 10-V dc bias. Resonances are turned off by removing the dc bias. This is the first demonstration of an intrinsically switchable interdigitated ferroelectric contour mode resonator.
ISSN:0018-9480
1557-9670
DOI:10.1109/TMTT.2013.2271756