Investigation of Glasses Using Surface Profiling by Spectrochemical Analysis of Sputter-Induced Radiation: I, Surface Profiling Technique with High In-Depth Resolution

Experimental equipment was developed to investigate concentration gradients in solid surface layers; the radiative de‐excitation of elements and molecules which are ejected from the ion beam‐bombarded solid and the luminescence excitation within the surface layer are recorded spectrographically. Examples show how elemental composition profiles can be calibrated with respect to depth. An in‐depth resolution of a few nanometers can be obtained. The original profiles are distorted by energy and charge transfer and by other peculiarities connected with ion‐beam etching; the extent to which these distortions must be taken into consideration in interpreting the results is discussed. Interdiffusion‐controlled solid‐state reactions of thin oxide films with a glass substrate were investigated. Advantages and disadvantages of the method for analysis and concentration profiling of glass surfaces and oxide layers on glasses in glass research and industry are discussed.