DC and RF characteristics of bilayer Schottky metal contact on n-GaN Schottky diode

In device technology, the multilayer contacts provide improved performance. The comparative study of different high work function bilayer Schottky metal (Pt/Pd, Pt/Ni and Pt/Ti) contact has been taken to study the DC and RF performance of n-GaN Schottky diode. The fabricated Schottky metal contact Pt/Pd, Pt/Ni and Pt/Ti annealed from room temperature to 800 °C studied shows that Pt/Pd Schottky metal contact on n-GaN shows high thermal stability and maximum barrier height 1.10 eV, ideality factor 1.001, lower series resistance and lower insertion loss (S21 dB) at high frequency compared to Pt/Ni and Pt/Ti bilayer Schottky metal contact.