Flow characterization of valveless micropump using driving equivalent moment: theory and experiments

A valveless micropump, actuated by a PZT disk bonded to a glass plate, can generate positive flow. In order to estimate flow characteristics of micropumps, it is necessary to theoretically analyze the radial expansion (more specifically, the equivalent moment) of the PZT disk according to the voltag...

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Veröffentlicht in:	Microfluidics and nanofluidics 2008-12, Vol.5 (6), p.795-807
Hauptverfasser:	Hwang, Il-Han, Lee, Sung-Kil, Shin, Sang-Mo, Lee, Yong-Gu, Lee, Jong-Hyun
Format:	Artikel
Sprache:	eng
Schlagworte:	Analytical Chemistry Applied fluid mechanics Applied sciences Biomedical Engineering and Bioengineering Electronics Engineering Engineering Fluid Dynamics Exact sciences and technology Flow characteristics Flow rates Fluid dynamics Fluidics Fundamental areas of phenomenology (including applications) Maximum flow Micro- and nanoelectromechanical devices (mems/nems) Nanotechnology and Microengineering Physics Research Paper Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Theory
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