Flow characterization of valveless micropump using driving equivalent moment: theory and experiments

A valveless micropump, actuated by a PZT disk bonded to a glass plate, can generate positive flow. In order to estimate flow characteristics of micropumps, it is necessary to theoretically analyze the radial expansion (more specifically, the equivalent moment) of the PZT disk according to the voltag...

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Veröffentlicht in:Microfluidics and nanofluidics 2008-12, Vol.5 (6), p.795-807
Hauptverfasser: Hwang, Il-Han, Lee, Sung-Kil, Shin, Sang-Mo, Lee, Yong-Gu, Lee, Jong-Hyun
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container_issue 6
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creator Hwang, Il-Han
Lee, Sung-Kil
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Lee, Yong-Gu
Lee, Jong-Hyun
description A valveless micropump, actuated by a PZT disk bonded to a glass plate, can generate positive flow. In order to estimate flow characteristics of micropumps, it is necessary to theoretically analyze the radial expansion (more specifically, the equivalent moment) of the PZT disk according to the voltage input. Using the equivalent moment, deflection equations are derived for the tri-layer disk (PZT, epoxy bonder and glass plate) and are confirmed to match well with experiments. The flow rate of the valveless micropump is also theoretically and experimentally investigated in terms of input voltage and oscillation frequency. The flow increased at a rate of 0.1 μL/min/V, and the maximum flow rate was obtained at the driving frequency of around 225 Hz.
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subjects Analytical Chemistry
Applied fluid mechanics
Applied sciences
Biomedical Engineering and Bioengineering
Electronics
Engineering
Engineering Fluid Dynamics
Exact sciences and technology
Flow characteristics
Flow rates
Fluid dynamics
Fluidics
Fundamental areas of phenomenology (including applications)
Maximum flow
Micro- and nanoelectromechanical devices (mems/nems)
Nanotechnology and Microengineering
Physics
Research Paper
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Theory
title Flow characterization of valveless micropump using driving equivalent moment: theory and experiments
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