Two-phase AC electrothermal fluidic pumping in a coplanar asymmetric electrode array

The ability to achieve fast fluid flow yet maintain a relatively low temperature rise is important for AC electrothermal (ACET) micropumping, especially in applications such as bioMEMS and lab-on-a-chip systems. In this paper, we propose a two-phase ACET fluidic micropump using a coplanar asymmetric electrode array. The proposed structure applies a two-phase AC voltage, i.e., voltage of phase 0°/180°, to the narrow electrodes while the wide electrodes are at ground potential. Numerical simulation demonstrates that this simple coplanar electrode configuration can achieve at least 25% faster fluid flow rates than using a single AC signal. By selecting certain design parameters, a two-phase ACET structure can achieve up to 50% faster fluid flow rates than a corresponding single-phase structure. The simple two-phase AC signal sources are easily produced by using inverter buffers, which is a considerable improvement compared to the multi-phase AC signals required by other electrokinetic micropumping methods, such as traveling wave structures.