Integrated Optofluidic Iris

An optofluidic iris, which uses the absorption of an opaque liquid in combination with a second transparent liquid for defining optical apertures of variable diameters, tuned by directly deforming a ring-shaped liquid-liquid interface using electrowetting on dielectrics, is presented. The novelty li...

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Veröffentlicht in:Journal of microelectromechanical systems 2012-10, Vol.21 (5), p.1156-1164
Hauptverfasser: Muller, P., Feuerstein, R., Zappe, H.
Format: Artikel
Sprache:eng
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Zusammenfassung:An optofluidic iris, which uses the absorption of an opaque liquid in combination with a second transparent liquid for defining optical apertures of variable diameters, tuned by directly deforming a ring-shaped liquid-liquid interface using electrowetting on dielectrics, is presented. The novelty lies not only in the absence of any moving parts or membranes but also in the design of the liquid ring, which allows planar microfabrication processes to be used exclusively for defining all functional parts of the iris. When compared to other optofluidic approaches, this concept combines ultracompactness, full integration, moderate drive voltage (75 V), low power consumption (
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2012.2196498