Handbook of Ion Beam Processing Technology - Principles, Deposition, Film Modification and Synthesis

Handbook of Ion Beam Processing Technology - Principles, Deposition, Film Modification and Synthesis

Deals with ion beam processing for basic sputter etching of samples, sputter deposition of thin films, the synthesis of material in thin film form, and the modification of the properties of thin films.

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Bibliographische Detailangaben
Hauptverfasser: Cuomo, Jerome J, Rossnagel, Stephen M, Kaufman, Harold R
Format: Buch
Sprache:eng
Schlagworte:
Electronics & Semiconductors
Industrial applications
Ion bombardment
Ion implantation
Manufacture & Processing
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Beschreibung
Zusammenfassung:Deals with ion beam processing for basic sputter etching of samples, sputter deposition of thin films, the synthesis of material in thin film form, and the modification of the properties of thin films.