Some peculiarities of pulsed laser deposition of large area thin films

The fabrication of large area Y-Ba-Cu-O thin films by pulsed laser deposition is discussed. The influence of laser spot dimension, laser fluence and the target topography on the plasma plume angular distribution has been investigated. A film-based method was used for determining angular distribution...

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Veröffentlicht in:	IEEE transactions on applied superconductivity 2001-03, Vol.11 (1), p.3859-3862
Hauptverfasser:	Kuzanyan, A.S., Badalyan, G.R., Nikoghosyan, V.R., Harutyunyan, S.R.
Format:	Artikel
Sprache:	eng
Schlagworte:	Angular distribution Condensed matter: electronic structure, electrical, magnetic, and optical properties Cross-disciplinary physics: materials science rheology DEPOSITION Exact sciences and technology Geometrical optics High-tc films Laser deposition Laser theory LASERS Materials science Methods of deposition of films and coatings film growth and epitaxy Optical films Optical materials Optical pulses PARTICULATES Physics Plumes Pulsed laser deposition Sputtering Substrates Superconducting films and low-dimensional structures Superconducting materials SUPERCONDUCTIVITY Surfaces THIN FILMS Topography YTTRIUM OXIDE
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