Some peculiarities of pulsed laser deposition of large area thin films

The fabrication of large area Y-Ba-Cu-O thin films by pulsed laser deposition is discussed. The influence of laser spot dimension, laser fluence and the target topography on the plasma plume angular distribution has been investigated. A film-based method was used for determining angular distribution. The primary factors affecting the form of the plume have been determined. The spatial distribution of laser-generated particulates has also been investigated. A simple method to obtain large area thin films by deposition through a mask has been examined for reducing the number of particulates.