Flame hydrolysis deposition of SiO2-TiO2 glass planar optical waveguides on silicon

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Veröffentlicht in:	Japanese journal of applied physics 1983-01, Vol.22 (12)
Hauptverfasser:	KAWACHI, M, YASU, M, KOBAYASHI, M
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Circuit properties Electric, optical and optoelectronic circuits Electronics Exact sciences and technology Integrated optics. Optical fibers and wave guides Optical and optoelectronic circuits
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container_issue	12
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container_title	Japanese journal of applied physics
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creator	KAWACHI, M YASU, M KOBAYASHI, M
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doi_str_mv	10.1143/jjap.22.1932
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identifier	ISSN: 0021-4922
ispartof	Japanese journal of applied physics, 1983-01, Vol.22 (12)
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source	IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link
subjects	Applied sciences Circuit properties Electric, optical and optoelectronic circuits Electronics Exact sciences and technology Integrated optics. Optical fibers and wave guides Optical and optoelectronic circuits
title	Flame hydrolysis deposition of SiO2-TiO2 glass planar optical waveguides on silicon
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