Development of the quadruple mass spectrometer with bessel-box type energy analyzer for the accurate measurement of partial pressures

Bibliographische Detailangaben

Hauptverfasser:	TAKAHASHI, N, YANAGISHITA, K, HAYASHI, T, AKIMICHI, H, TUZI, Y
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Physics Vacuum apparatus and techniques Vacuum chambers, auxiliary apparatus and materials
Online-Zugang:	Volltext
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