Calculation of sputtering of sequentially increasing atom blocks

Some simplified models are used to computer-calculate the parameters of Cu single crystal sputtering by 1 keV Ar ions. Each of the models is a confined structure of a perfect single crystal with various numbers of atoms (from 2 to 34). The sputtering yields, the energy spectra and spatial distributi...

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Veröffentlicht in:	Radiation effects 1984-01, Vol.83 (1-2), p.39-67
Hauptverfasser:	Eltekov, V. A., Popova, O. A., Yurasova, V. E.
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Cross-disciplinary physics: materials science rheology Electron and ion emission by liquids and solids impact phenomena Exact sciences and technology Impact phenomena (including electron spectra and sputtering) Materials science Metals, semimetals and alloys Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Other electron-impact emission phenomena Other interactions of matter with particles and radiation Physics Specific materials
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Beschreibung
Zusammenfassung:	Some simplified models are used to computer-calculate the parameters of Cu single crystal sputtering by 1 keV Ar ions. Each of the models is a confined structure of a perfect single crystal with various numbers of atoms (from 2 to 34). The sputtering yields, the energy spectra and spatial distributions of sputtered atoms are calculated at various energies of bombarding ions.
ISSN:	0033-7579 2331-3455
DOI:	10.1080/00337578408215789