Real time control of reactive magnetron-sputter deposited optical filters by in situ spectroscopic ellipsometry

Real time control of reactive magnetron-sputter deposited optical filters by in situ spectroscopic ellipsometry

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Bibliographische Detailangaben
Hauptverfasser: VERGÖHL, M, MALKOMES, N, MATTHEE, T, BRÄUER, G
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Cross-disciplinary physics: materials science
rheology
Deposition by sputtering
Exact sciences and technology
Filters, zone plates, and polarizers
Fundamental areas of phenomenology (including applications)
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Optical elements, devices, and systems
Optics
Physics
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ISSN:0040-6090
1879-2731