Thermally stimulated depolarization current controlled by surface charge change

The results of thermally stimulated polarization (TSPC) and depolarization (TSDC) current and triangle voltage sweep (TVS) measurements in AlSiO2Si are explained on the basis of a model which assumes apart from the mobile ionic charge the existence of a positive surface charge in the insulator layer located in the vicinity of the metal–silicon dioxide interface. The effect of this charge and its contribution to the TSDC are discussed. It is shown that from the TVS data it is possible to obtain the actual ionic charge density and a combined use of TVS and TSDC measurements allows estimation of the surface charge contribution to the instability of the MIS structures. [Russian Text Ignored].