Planar, linear GaAs detector-amplifier array with an insulating AlGaAs spacing layer between the detector and transistor layers

Monolithic, high-speed planar, linear, parallel channel, ten-element GaAs detector-amplifier arrays with a 70- mu m detector center-to-center spacing have been fabricated using a GaAs-AlGaAs-GaAs epitaxial structure grown on semi-insulating GaAs. The AlGaAs layer provided excellent electrical isolat...

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Veröffentlicht in:IEEE electron device letters 1988-10, Vol.9 (10), p.550-552
Hauptverfasser: Anderson, G.W., Papanicolaou, N.A., Ma, D.I., Mack, I.A.G., Modolo, J.A., Kub, F.J., Young, C.W., Thompson, P.E., Boos, J.B.
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container_end_page 552
container_issue 10
container_start_page 550
container_title IEEE electron device letters
container_volume 9
creator Anderson, G.W.
Papanicolaou, N.A.
Ma, D.I.
Mack, I.A.G.
Modolo, J.A.
Kub, F.J.
Young, C.W.
Thompson, P.E.
Boos, J.B.
description Monolithic, high-speed planar, linear, parallel channel, ten-element GaAs detector-amplifier arrays with a 70- mu m detector center-to-center spacing have been fabricated using a GaAs-AlGaAs-GaAs epitaxial structure grown on semi-insulating GaAs. The AlGaAs layer provided excellent electrical isolation between the transistor and n-type photoconductor epitaxial layers. Rise and fall times of integrated detector-amplifier array channels of 650 ps and 1.1 ns, respectively, were measured at 0.84- mu m wavelength. The sensitivity of single, discrete, detector-amplifier channels was better than -34 dBm.< >
doi_str_mv 10.1109/55.17841
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subjects Acoustic signal detection
Applied sciences
Circuits
Detectors
Doping
Electronics
Exact sciences and technology
FETs
Gallium arsenide
Gold
Insulation
Integrated circuits
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Sensor arrays
Silicon
title Planar, linear GaAs detector-amplifier array with an insulating AlGaAs spacing layer between the detector and transistor layers
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