Relationship between crystal structure and chemical composition of PbTiO3 thin films prepared by sputter-assisted plasma CVD

Relationship between crystal structure and chemical composition of PbTiO3 thin films prepared by sputter-assisted plasma CVD

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Veröffentlicht in:Japanese journal of applied physics 1992-06, Vol.31 (6A), p.1872-1873
Hauptverfasser: MIHARA, T, MOCHIZUKI, S, KIMURA, S, MAKABE, R
Format: Artikel
Sprache:eng
Schlagworte:
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Physics
Solid surfaces and solid-solid interfaces
Surface and interface dynamics and vibrations
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
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container_end_page 1873
container_issue 6A
container_start_page 1872
container_title Japanese journal of applied physics
container_volume 31
creator MIHARA, T
MOCHIZUKI, S
KIMURA, S
MAKABE, R
description
doi_str_mv 10.1143/jjap.31.1872
format Article
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ispartof Japanese journal of applied physics, 1992-06, Vol.31 (6A), p.1872-1873
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source IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link
subjects Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Physics
Solid surfaces and solid-solid interfaces
Surface and interface dynamics and vibrations
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
title Relationship between crystal structure and chemical composition of PbTiO3 thin films prepared by sputter-assisted plasma CVD
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