PREPARATION OF YBA2CU3OX THIN-FILMS BY LAYER-BY-LAYER METALORGANIC CHEMICAL VAPOR-DEPOSITION

PREPARATION OF YBA2CU3OX THIN-FILMS BY LAYER-BY-LAYER METALORGANIC CHEMICAL VAPOR-DEPOSITION

We have investigated the preparation of YBa2Cu3Ox thin films on MgO (100) substrates by sequential metalorganic source supply with the metal configuration along the c-axis at low substrate temperature (560-degrees-C). Oxygen is also sequentially supplied to the substrate. Four types of films are pre...

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Veröffentlicht in:JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS 1992, Vol.31 (6B), p.L787-L789
Hauptverfasser: FUJII, K, ZAMA, H, ODA, S
Format: Artikel
Sprache:eng
Schlagworte:
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Physical Sciences
Physics
Physics, Applied
Science & Technology
Solid surfaces and solid-solid interfaces
Surface and interface dynamics and vibrations
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
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Zusammenfassung:We have investigated the preparation of YBa2Cu3Ox thin films on MgO (100) substrates by sequential metalorganic source supply with the metal configuration along the c-axis at low substrate temperature (560-degrees-C). Oxygen is also sequentially supplied to the substrate. Four types of films are prepared by various sequential supply patterns of metalorganic precursors and oxygen. Our results show that layer-by-layer oxidation is important for c-axis orientation of the films and that Ba is more suitable than Cu as the first layer with respect to preventing the growth of CuYO2.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.31.L787