Oxygen rich SIMOX?

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Veröffentlicht in:	Semiconductor science and technology 1991-08, Vol.6 (8), p.730-734
Hauptverfasser:	Scanlon, P J, Hemment, P L F, Reeson, K J, Robinson, A K, Kilner, J A, Chater, R J, Harbeke, G
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Defects and impurities in crystals microstructure Doping and impurity implantation in iii-v and ii-vi semiconductors Exact sciences and technology Physics Structure of solids and liquids crystallography
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ispartof	Semiconductor science and technology, 1991-08, Vol.6 (8), p.730-734
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source	IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link
subjects	Condensed matter: structure, mechanical and thermal properties Defects and impurities in crystals microstructure Doping and impurity implantation in iii-v and ii-vi semiconductors Exact sciences and technology Physics Structure of solids and liquids crystallography
title	Oxygen rich SIMOX?
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