Studies of stress related issues in microwave CVD diamond on silicon substrates: Diamond films and related materials

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Veröffentlicht in:	Thin solid films 1992, Vol.212 (1-2), p.180-185
Hauptverfasser:	BAGLIO, J. A, FARNSWORTH, B. C, HANKIN, S, HAMILL, G, O'NEIL, D
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Deformation and plasticity (including yield, ductility, and superplasticity) Exact sciences and technology Mechanical and acoustical properties of condensed matter Mechanical properties of solids Physics
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source	Elsevier ScienceDirect Journals
subjects	Condensed matter: structure, mechanical and thermal properties Deformation and plasticity (including yield, ductility, and superplasticity) Exact sciences and technology Mechanical and acoustical properties of condensed matter Mechanical properties of solids Physics
title	Studies of stress related issues in microwave CVD diamond on silicon substrates: Diamond films and related materials
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