Studies of stress related issues in microwave CVD diamond on silicon substrates: Diamond films and related materials

Bibliographische Detailangaben

Veröffentlicht in:	Thin solid films 1992, Vol.212 (1-2), p.180-185
Hauptverfasser:	BAGLIO, J. A, FARNSWORTH, B. C, HANKIN, S, HAMILL, G, O'NEIL, D
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Deformation and plasticity (including yield, ductility, and superplasticity) Exact sciences and technology Mechanical and acoustical properties of condensed matter Mechanical properties of solids Physics
Online-Zugang:	Volltext
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