An MBE growth facility for real‐time in situ synchrotron x‐ray topography studies of strained‐layer III–V epitaxial materials
This paper describes a unique combined UHV MBE growth x‐ray topography facility designed to allow the first real‐time synchrotron radiation x‐ray topography study of strained‐layer III–V growth processes. This system will enable unambiguous determination of dislocation nucleation and multiplication...
Gespeichert in:
Veröffentlicht in: | Review of Scientific Instruments 1992-01, Vol.63 (1), p.634-637 |
---|---|
Hauptverfasser: | , , , , , , , , , , , , , , |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | This paper describes a unique combined UHV MBE growth x‐ray topography facility designed to allow the first real‐time synchrotron radiation x‐ray topography study of strained‐layer III–V growth processes. This system will enable unambiguous determination of dislocation nucleation and multiplication processes as a function of controlled variations in growth conditions, and also during post‐growth thermal processing. The planned experiments have placed very stringent demands upon the engineering design of the system, and design details regarding the growth chamber; sample manipulator, x‐ray optics, and real‐time imaging systems are described. Results obtained during a feasibility study are also presented. |
---|---|
ISSN: | 0034-6748 1089-7623 |
DOI: | 10.1063/1.1142675 |