ACCURATE MEASUREMENT OF ATOMIC-BEAM FLUX BY PSEUDO-DOUBLE-BEAM ATOMIC-ABSORPTION SPECTROSCOPY FOR GROWTH OF THIN-FILM OXIDE SUPERCONDUCTORS

We report the use of pseudo-double-beam atomic absorption spectroscopy to make very accurate (0.1%-1%) measurements of the beam flux from Knudsen effusion cells in a molecular beam epitaxy system. This system has been used to grow Bi-Sr-Ca-Cu-O-based superconducting thin films and heterostructures i...

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Veröffentlicht in:Applied physics letters 1992-02, Vol.60 (5), p.657-659
Hauptverfasser: KLAUSMEIERBROWN, ME, ECKSTEIN, JN, BOZOVIC, VIRSHUP, GF
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Sprache:eng
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Zusammenfassung:We report the use of pseudo-double-beam atomic absorption spectroscopy to make very accurate (0.1%-1%) measurements of the beam flux from Knudsen effusion cells in a molecular beam epitaxy system. This system has been used to grow Bi-Sr-Ca-Cu-O-based superconducting thin films and heterostructures in an atomic-layer-by-layer fashion. The resulting material displays excellent crystallographic and transport properties. Atomic absorption measurement of beam fluxes may also be of benefit for other materials systems, such as InGaAs/InP.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.106584