ACCURATE MEASUREMENT OF ATOMIC-BEAM FLUX BY PSEUDO-DOUBLE-BEAM ATOMIC-ABSORPTION SPECTROSCOPY FOR GROWTH OF THIN-FILM OXIDE SUPERCONDUCTORS
We report the use of pseudo-double-beam atomic absorption spectroscopy to make very accurate (0.1%-1%) measurements of the beam flux from Knudsen effusion cells in a molecular beam epitaxy system. This system has been used to grow Bi-Sr-Ca-Cu-O-based superconducting thin films and heterostructures i...
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Veröffentlicht in: | Applied physics letters 1992-02, Vol.60 (5), p.657-659 |
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Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | We report the use of pseudo-double-beam atomic absorption spectroscopy to make very accurate (0.1%-1%) measurements of the beam flux from Knudsen effusion cells in a molecular beam epitaxy system. This system has been used to grow Bi-Sr-Ca-Cu-O-based superconducting thin films and heterostructures in an atomic-layer-by-layer fashion. The resulting material displays excellent crystallographic and transport properties. Atomic absorption measurement of beam fluxes may also be of benefit for other materials systems, such as InGaAs/InP. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.106584 |