Optically guided large‐nanostructure probe

A large‐nanostructure probe with optically guided macroscopic scanning has been developed for high‐resolution imaging and characterization of nanostructures. The novel optical viewing system allows placement of the imaging tip to within 1 μm of a desired site on the sample during coarse positioning....

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Veröffentlicht in:Review of scientific instruments 1993-05, Vol.64 (5), p.1248-1252
Hauptverfasser: Marchman, Herschel M., Wetsel, Grover C.
Format: Artikel
Sprache:eng
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Zusammenfassung:A large‐nanostructure probe with optically guided macroscopic scanning has been developed for high‐resolution imaging and characterization of nanostructures. The novel optical viewing system allows placement of the imaging tip to within 1 μm of a desired site on the sample during coarse positioning. Fine positioning and imaging are accomplished with nanometer‐scale resolution using a segmented‐tube piezoelectric scanner. High‐resolution images of identifiable quantum dots have been obtained to demonstrate the efficacy of the method.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1144125