High‐resolution capacitive pressure gauges

Design, construction, methods of measurement, and uses of high‐resolution capacitive pressure gauges in low temperature applications are reviewed. Pressure gauges for use from 10−3 to over 107 Pa, with a resolution of as high as 1×10−8 are described. Many uses that have been made of these gauges are...

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Veröffentlicht in:Review of scientific instruments 1993-03, Vol.64 (3), p.601-611
1. Verfasser: Adams, E. Dwight
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creator Adams, E. Dwight
description Design, construction, methods of measurement, and uses of high‐resolution capacitive pressure gauges in low temperature applications are reviewed. Pressure gauges for use from 10−3 to over 107 Pa, with a resolution of as high as 1×10−8 are described. Many uses that have been made of these gauges are mentioned with emphasis on 3He melting pressure thermometry.
doi_str_mv 10.1063/1.1144184
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subjects Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical instruments, equipment and techniques
Physics
title High‐resolution capacitive pressure gauges
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