High‐resolution capacitive pressure gauges

Design, construction, methods of measurement, and uses of high‐resolution capacitive pressure gauges in low temperature applications are reviewed. Pressure gauges for use from 10−3 to over 107 Pa, with a resolution of as high as 1×10−8 are described. Many uses that have been made of these gauges are...

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Veröffentlicht in:	Review of scientific instruments 1993-03, Vol.64 (3), p.601-611
1. Verfasser:	Adams, E. Dwight
Format:	Artikel
Sprache:	eng
Schlagworte:	Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical instruments, equipment and techniques Physics
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	Design, construction, methods of measurement, and uses of high‐resolution capacitive pressure gauges in low temperature applications are reviewed. Pressure gauges for use from 10−3 to over 107 Pa, with a resolution of as high as 1×10−8 are described. Many uses that have been made of these gauges are mentioned with emphasis on 3He melting pressure thermometry.
ISSN:	0034-6748 1089-7623
DOI:	10.1063/1.1144184