Electrical characteristics of TiB2 for ULSI applications

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Veröffentlicht in:	IEEE transactions on electron devices 1992-10, Vol.39 (10), p.2341-2345
Hauptverfasser:	CHANG SIK CHOI, QINGFENG WANG, OSBURN, C. M, RUGGLES, G. A, SHAH, A. S
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Electronics Exact sciences and technology Interfaces Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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description
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ispartof	IEEE transactions on electron devices, 1992-10, Vol.39 (10), p.2341-2345
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language	eng
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source	IEEE Electronic Library (IEL)
subjects	Applied sciences Electronics Exact sciences and technology Interfaces Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
title	Electrical characteristics of TiB2 for ULSI applications
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