Use of high performance resins for the planarization of magnetic rigid disk substrates
A high-performance thermoset polymer, benzocyclobutene, has been used to planarize magnetic rigid disk, substrates. Typically, one layer (1-5 mu m thick) of spin-coated and cured material is applied to either rough (R/sub A/=200 nm) or smooth (R/sub A/=20 nm) Al substrates with no further processing...
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Veröffentlicht in: | IEEE transactions on magnetics 1991-11, Vol.27 (6), p.5175-5177 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | A high-performance thermoset polymer, benzocyclobutene, has been used to planarize magnetic rigid disk, substrates. Typically, one layer (1-5 mu m thick) of spin-coated and cured material is applied to either rough (R/sub A/=200 nm) or smooth (R/sub A/=20 nm) Al substrates with no further processing, resulting in R/sub A/'s of 1-2 nm and flatness about 1 mu m. Various magnetic media have been coated on the resin planarized substrates, including both particulate and sputtered high-coercivity thin film, with resultant magnetic and recording properties comparable to those obtained with Ni(P)-Al substrates. The planarizing resin can be used with Al, ceramic, and other types of substrates, and can be textured. It offers performance equivalent to that of Ni(P).< > |
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ISSN: | 0018-9464 1941-0069 |
DOI: | 10.1109/20.278778 |