A calibration of the localized vibrational mode absorption line due to isovalent boron impurities in gallium arsenide
GaAs samples doped with boron up to (B) = 3 x 10 super(18) cm super(-3) have been analysed by local vibrational mode infrared absorption spectroscopy and by SIMS. A calibration has been established indicating that an integrated absorption of 1 cm super(-2) in the LVM line at 517 cm super(-1) due to...
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Veröffentlicht in: | Semiconductor science and technology 1992-11, Vol.7 (11), p.1306-1309 |
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