International Conference on Metallurgical Coatings and Thin Films

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Bibliographische Detailangaben
Hauptverfasser:	SARTWELL, Bruce D, GIVENS, John H, MITTERER, Christian, ROHDE, Suzanne L
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Applied sciences Cross-disciplinary physics: materials science rheology Design. Technologies. Operation analysis. Testing Electronics Exact sciences and technology Integrated circuits Materials science Methods of deposition of films and coatings film growth and epitaxy Microelectronics: LSI, VLSI, ULSI integrated circuit fabrication technology Physics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online-Zugang:	Volltext
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ISSN:	0040-6090