ZrAl3 intermetallic compound thin film as a diffusion barrier between Al and Au layers
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| Veröffentlicht in: | Japanese journal of applied physics 1994, Vol.33 (6A), p.3531-3537 |
|---|---|
| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | eng |
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| container_end_page | 3537 |
|---|---|
| container_issue | 6A |
| container_start_page | 3531 |
| container_title | Japanese journal of applied physics |
| container_volume | 33 |
| creator | JIN-KUO HO KWANG-LUNG LIN |
| description | |
| doi_str_mv | 10.1143/jjap.33.3531 |
| format | Article |
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| fulltext | fulltext |
| identifier | ISSN: 0021-4922 |
| ispartof | Japanese journal of applied physics, 1994, Vol.33 (6A), p.3531-3537 |
| issn | 0021-4922 1347-4065 |
| language | eng |
| recordid | cdi_pascalfrancis_primary_4223360 |
| source | Institute of Physics Journals |
| subjects | Applied sciences Condensed matter: structure, mechanical and thermal properties Diffusion interface formation Exact sciences and technology Metals. Metallurgy Physical properties of thin films, nonelectronic Physics Solid surfaces and solid-solid interfaces Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) |
| title | ZrAl3 intermetallic compound thin film as a diffusion barrier between Al and Au layers |
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