Continued improvement of large area, in situ sputter deposition of superconducting YBCO thin films

The deposition of thin films of superconducting YBa/sub 2/Cu/sub 3/O/sub 7-x/ onto substrates of up to 3-in diameter by an integrated off-axis sputtering is reported. The substrate is located above the center of an 8-in-diameter YBCO planar target, and, in conjunction with a negative ion shield, neg...

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Veröffentlicht in:	IEEE transactions on applied superconductivity 1993-03, Vol.3 (1), p.1679-1682
Hauptverfasser:	Truman, J.K., White, W.R., Ballentine, P.H., Mallory, D.S., Kadin, A.M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Electromagnetic heating Exact sciences and technology High-tc films Insulation Physics Sputtering Substrates Superconducting epitaxial layers Superconducting films and low-dimensional structures Superconducting microwave devices Superconducting thin films Superconductivity Surface morphology Surface resistance Yttrium barium copper oxide
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Beschreibung
Zusammenfassung:	The deposition of thin films of superconducting YBa/sub 2/Cu/sub 3/O/sub 7-x/ onto substrates of up to 3-in diameter by an integrated off-axis sputtering is reported. The substrate is located above the center of an 8-in-diameter YBCO planar target, and, in conjunction with a negative ion shield, negative ion effects are avoided. A large radiant heater provides backside, noncontact heating of the bare substrates. YBCO films have been grown on polished 1-cm/sup 2/ MgO and LaAlO/sub 3/ substrates with T/sub c/>or=90 K, J/sub c/>or=2.5*10/sup 6/ A/cm/sup 2/ at 77 K, and microwave surface resistance R/sub S/
ISSN:	1051-8223 1558-2515
DOI:	10.1109/77.233788