Millimeter-wave asymmetric Fabry-Perot modulators

We have designed, fabricated, and characterized GaAs-AlGaAs (/spl lambda/=864 nm) asymmetric Fabry-Perot modulators with /spl ap/37 GHz modulation frequency response, comparable to the fastest waveguide modulators. The modulation response saturates at high optical powers due to saturation of the excitonic absorption and heating effects, but the frequency response is independent of the incident optical intensity, since it depends only on the RC time constant, and not on the carrier transit time. The device design takes advantage of the fact that the quantum-confined Stark effect is more pronounced at some distance from the absorption edge to achieve a modulator with /spl ges/20 dB contrast and /spl ap/3 dB insertion loss for /spl plusmn/2 V operating voltage, but only 21 fF capacitance. The DC bias used to move the operating point off the absorption edge has the additional benefits of improving the linearity and chirp of the device, as well as the saturation intensity. Here we present measurements of the modulation and photocurrent responses of the modulators, calculate the RC and transit times for the device, analyze the saturation mechanisms, and discuss the linearity and chirp of the device from the perspective of a high-speed digital optical communications system.< >