Spatiotemporal electron dynamics in radio-frequency glow discharges: fluid versus dynamic Monte Carlo simulations

A particle-in-cell/dynamic Monte Carlo simulation technique was developed to study the spatiotemporal electron dynamics in RF low pressure glow discharge plasmas. The electric field profile in a parallel plate one-dimensional geometry was obtained from a self-consistent fluid simulation. A strongly...

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Veröffentlicht in:	Journal of physics. D, Applied physics Applied physics, 1995-04, Vol.28 (4), p.727-737
Hauptverfasser:	Lymberopoulos, D P, Economou, D J
Format:	Artikel
Sprache:	eng
Schlagworte:	Electric discharges Exact sciences and technology Glow corona Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges
Online-Zugang:	Volltext
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