Spatiotemporal electron dynamics in radio-frequency glow discharges: fluid versus dynamic Monte Carlo simulations

A particle-in-cell/dynamic Monte Carlo simulation technique was developed to study the spatiotemporal electron dynamics in RF low pressure glow discharge plasmas. The electric field profile in a parallel plate one-dimensional geometry was obtained from a self-consistent fluid simulation. A strongly electronegative chlorine discharge and an electropositive argon discharge were considered. Time-average results from the Monte Carlo simulation matched the fluid simulation favourably, with differences confined mainly to the volume around the plasma/sheath interface. (Original abstract-amended)