Spatiotemporal electron dynamics in radio-frequency glow discharges: fluid versus dynamic Monte Carlo simulations

Spatiotemporal electron dynamics in radio-frequency glow discharges: fluid versus dynamic Monte Carlo simulations

A particle-in-cell/dynamic Monte Carlo simulation technique was developed to study the spatiotemporal electron dynamics in RF low pressure glow discharge plasmas. The electric field profile in a parallel plate one-dimensional geometry was obtained from a self-consistent fluid simulation. A strongly...

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Veröffentlicht in:Journal of physics. D, Applied physics Applied physics, 1995-04, Vol.28 (4), p.727-737
Hauptverfasser: Lymberopoulos, D P, Economou, D J
Format: Artikel
Sprache:eng
Schlagworte:
Electric discharges
Exact sciences and technology
Glow
corona
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
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container_title Journal of physics. D, Applied physics
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creator Lymberopoulos, D P
Economou, D J
description A particle-in-cell/dynamic Monte Carlo simulation technique was developed to study the spatiotemporal electron dynamics in RF low pressure glow discharge plasmas. The electric field profile in a parallel plate one-dimensional geometry was obtained from a self-consistent fluid simulation. A strongly electronegative chlorine discharge and an electropositive argon discharge were considered. Time-average results from the Monte Carlo simulation matched the fluid simulation favourably, with differences confined mainly to the volume around the plasma/sheath interface. (Original abstract-amended)
doi_str_mv 10.1088/0022-3727/28/4/016
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subjects Electric discharges
Exact sciences and technology
Glow
corona
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
title Spatiotemporal electron dynamics in radio-frequency glow discharges: fluid versus dynamic Monte Carlo simulations
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