container_end_page 4895
container_issue 9B
container_start_page 4890
container_title Japanese journal of applied physics
container_volume 35
creator KANG, C. S
HWANG, C. S
CHO, H.-J
LEE, B. T
PARK, S. O
KIM, J. W
HORII, H
LEE, S. I
KOH, Y. B
LEE, M. Y
description
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ispartof Japanese journal of applied physics, 1996, Vol.35 (9B), p.4890-4895
issn 0021-4922
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language eng
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source IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link
subjects Acoustic wave devices, piezoelectric and piezoresistive devices
Applied sciences
Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Cross-disciplinary physics: materials science
rheology
Dielectric properties of solids and liquids
Dielectric, ferroelectric, and piezoelectric devices
Dielectric, piezoelectric, ferroelectric and antiferroelectric materials
Dielectrics, piezoelectrics, and ferroelectrics and their properties
Electronics
Exact sciences and technology
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Niobates, titanates, tantalates, pzt ceramics, etc
Permittivity (dielectric function)
Physics
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
title Preparation and electrical properties of SrTiO3 thin films deposited by liquid source metal-organic chemical vapor deposition (MOCVD)
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