Preparation and electrical properties of SrTiO3 thin films deposited by liquid source metal-organic chemical vapor deposition (MOCVD)

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Veröffentlicht in:	Japanese journal of applied physics 1996, Vol.35 (9B), p.4890-4895
Hauptverfasser:	KANG, C. S, HWANG, C. S, CHO, H.-J, LEE, B. T, PARK, S. O, KIM, J. W, HORII, H, LEE, S. I, KOH, Y. B, LEE, M. Y
Format:	Artikel
Sprache:	eng
Schlagworte:	Acoustic wave devices, piezoelectric and piezoresistive devices Applied sciences Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.) Condensed matter: electronic structure, electrical, magnetic, and optical properties Cross-disciplinary physics: materials science rheology Dielectric properties of solids and liquids Dielectric, ferroelectric, and piezoelectric devices Dielectric, piezoelectric, ferroelectric and antiferroelectric materials Dielectrics, piezoelectrics, and ferroelectrics and their properties Electronics Exact sciences and technology Materials science Methods of deposition of films and coatings film growth and epitaxy Niobates, titanates, tantalates, pzt ceramics, etc Permittivity (dielectric function) Physics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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