Investigation of different oxidation processes for porous silicon studies by spectroscopic ellipsometry

Bibliographische Detailangaben

Hauptverfasser:	FROTSCHER, U, ROSSOW, U, EBERT, M, PIETRYGA, C, RICHTER, W, BERGER, M. G, ARENS-FISCHER, R, MÜNDER, H
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Exact sciences and technology Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Optical properties of bulk materials and thin films Physics
Online-Zugang:	Volltext
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