A very accurate measurement system for multielectrode capacitive sensors

A very accurate capacitance-measurement system consisting of a discrete capacitance-dependent oscillator and a microcontroller has been developed. It can measure multielectrode capacitors with capacitances up to 2 pF, with an accuracy of 100 ppm with respect to a reference capacitor. The resolution...

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Veröffentlicht in:IEEE transactions on instrumentation and measurement 1996-04, Vol.45 (2), p.531-535
Hauptverfasser: Toth, F.N., Meijer, G.C.M., Kerkvliet, H.M.M.
Format: Artikel
Sprache:eng
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Zusammenfassung:A very accurate capacitance-measurement system consisting of a discrete capacitance-dependent oscillator and a microcontroller has been developed. It can measure multielectrode capacitors with capacitances up to 2 pF, with an accuracy of 100 ppm with respect to a reference capacitor. The resolution amounts to 50 aF with a total measurement time of 300 ms.
ISSN:0018-9456
1557-9662
DOI:10.1109/19.492781