Simultaneous changes in the photoluminescence, infrared absorption and morphology of porous silicon during etching by HF
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| Veröffentlicht in: | Semiconductor science and technology 1996-04, Vol.11 (4), p.601-606 |
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| container_end_page | 606 |
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| container_issue | 4 |
| container_start_page | 601 |
| container_title | Semiconductor science and technology |
| container_volume | 11 |
| creator | Gorbach, T Ya Rudko, G Yu Smertenko, P S Svechnikov, S V Valakh, M Ya Bondarenko, V P Dorofeev, A M |
| description | |
| doi_str_mv | 10.1088/0268-1242/11/4/024 |
| format | Article |
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| fulltext | fulltext |
| identifier | ISSN: 0268-1242 |
| ispartof | Semiconductor science and technology, 1996-04, Vol.11 (4), p.601-606 |
| issn | 0268-1242 1361-6641 |
| language | eng |
| recordid | cdi_pascalfrancis_primary_3029409 |
| source | IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link |
| subjects | Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Defects and impurities in crystals microstructure Elemental semiconductors Exact sciences and technology Materials science Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Photoluminescence Physics Structure of solids and liquids crystallography Surface cleaning, etching, patterning Surface treatments |
| title | Simultaneous changes in the photoluminescence, infrared absorption and morphology of porous silicon during etching by HF |
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