Simultaneous changes in the photoluminescence, infrared absorption and morphology of porous silicon during etching by HF

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Bibliographische Detailangaben
Veröffentlicht in:	Semiconductor science and technology 1996-04, Vol.11 (4), p.601-606
Hauptverfasser:	Gorbach, T Ya, Rudko, G Yu, Smertenko, P S, Svechnikov, S V, Valakh, M Ya, Bondarenko, V P, Dorofeev, A M
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Defects and impurities in crystals microstructure Elemental semiconductors Exact sciences and technology Materials science Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Photoluminescence Physics Structure of solids and liquids crystallography Surface cleaning, etching, patterning Surface treatments
Online-Zugang:	Volltext
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