The upper energy limit of a self-sustained discharge-pumped ArF laser

The upper energy limit of a self-sustained discharge-pumped ArF laser

The upper limit of this ArF laser was studied by numerical modelling. It is shown that kinetic processes alone serve to limit the specific laser energy to a value of 20 J l\+-1\-. Optimization of laser performance was performed by varying the gas mixture. Possible ways of increasing specific laser e...

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Veröffentlicht in:Journal of physics. D, Applied physics Applied physics, 1996-01, Vol.29 (1), p.43-49
Hauptverfasser: Lo, Dennis, Shchedrin, A I, Ryabtsev, A V
Format: Artikel
Sprache:eng
Schlagworte:
Exact sciences and technology
Fundamental areas of phenomenology (including applications)
Gas lasers including excimer and metal-vapor lasers
Lasers
Optics
Physics
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container_end_page 49
container_issue 1
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container_title Journal of physics. D, Applied physics
container_volume 29
creator Lo, Dennis
Shchedrin, A I
Ryabtsev, A V
description The upper limit of this ArF laser was studied by numerical modelling. It is shown that kinetic processes alone serve to limit the specific laser energy to a value of 20 J l\+-1\-. Optimization of laser performance was performed by varying the gas mixture. Possible ways of increasing specific laser energy and efficiency are discussed. (Original abstract)
doi_str_mv 10.1088/0022-3727/29/1/009
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source IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link
subjects Exact sciences and technology
Fundamental areas of phenomenology (including applications)
Gas lasers including excimer and metal-vapor lasers
Lasers
Optics
Physics
title The upper energy limit of a self-sustained discharge-pumped ArF laser
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