The upper energy limit of a self-sustained discharge-pumped ArF laser

The upper limit of this ArF laser was studied by numerical modelling. It is shown that kinetic processes alone serve to limit the specific laser energy to a value of 20 J l\+-1\-. Optimization of laser performance was performed by varying the gas mixture. Possible ways of increasing specific laser e...

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Veröffentlicht in:	Journal of physics. D, Applied physics Applied physics, 1996-01, Vol.29 (1), p.43-49
Hauptverfasser:	Lo, Dennis, Shchedrin, A I, Ryabtsev, A V
Format:	Artikel
Sprache:	eng
Schlagworte:	Exact sciences and technology Fundamental areas of phenomenology (including applications) Gas lasers including excimer and metal-vapor lasers Lasers Optics Physics
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	The upper limit of this ArF laser was studied by numerical modelling. It is shown that kinetic processes alone serve to limit the specific laser energy to a value of 20 J l\+-1\-. Optimization of laser performance was performed by varying the gas mixture. Possible ways of increasing specific laser energy and efficiency are discussed. (Original abstract)
ISSN:	0022-3727 1361-6463
DOI:	10.1088/0022-3727/29/1/009