Complex XRD microstructural studies of hard coatings applied to PVD-deposited TiN films. II: Transition from porous to compact films and microstructural inhomogeneity of the layers

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Veröffentlicht in:	Thin solid films 1995, Vol.268 (1-2), p.72-82
Hauptverfasser:	KUZEL, R. JR, CERNY, R, VALVODA, V, BLOMBERG, M, MERISALO, M, KADLEC, S
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Physics Structure and morphology thickness Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology
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creator	KUZEL, R. JR CERNY, R VALVODA, V BLOMBERG, M MERISALO, M KADLEC, S
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source	Elsevier ScienceDirect Journals
subjects	Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Physics Structure and morphology thickness Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology
title	Complex XRD microstructural studies of hard coatings applied to PVD-deposited TiN films. II: Transition from porous to compact films and microstructural inhomogeneity of the layers
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