Design and analysis of an innovative light tracking device based on opto-thermo-electro-mechanical actuators: Micro/Nano Devices and Systems 2013: An open thematic journal issue

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Veröffentlicht in:	Microelectronic engineering 2014, Vol.119, p.37-43
Hauptverfasser:	MAHMOUDPOUR, Masihollah, ZABIHOLLAH, Abolghassem, VESAGHI, Mohammad, KOLBADINEJAD, Mohadese
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Computer science control theory systems Condensed matter: electronic structure, electrical, magnetic, and optical properties Control theory. Systems Dielectrics, piezoelectrics, and ferroelectrics and their properties Electronics Exact sciences and technology General equipment and techniques Instruments, apparatus, components and techniques common to several branches of physics and astronomy Optoelectronic devices Physics Piezoelectricity and electromechanical effects Robotics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Transducers
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ISSN:	0167-9317 1873-5568